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<span style="color: rgb(31, 73, 125); font-family: Arial, "sans-serif"; font-size: 10.5pt;"> ***** Seminar *****</span><br>
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<b><span style="font-size:16.0pt; color:#1F497D">Department of Electrical and Computer Engineering</span></b><span style="font-size:16.0pt; color:#1F497D"></span></p>
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<b><span style="font-size:16.0pt; color:#1F497D">Materials Engineering Program</span></b></p>
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<b><span style="font-size:14.0pt; color:#1F497D">Texas Center for Su</span><span style="font-size:14pt; color:rgb(23,78,134)">perconductivity at Univ. of Houston</span><span style="font-size:14.0pt; color:#1F497D"><br>
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<b><span style="font-size:14pt; color:rgb(23,78,134)">Center for Integrated Bio and Nano Systems</span></b></p>
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<b><span style="font-size:14pt; color:rgb(23,78,134)"> 10</span><span style="font-size:14pt; color:rgb(23,78,134)">:30 a.m., Nov. 12</span></b><b><span style="font-size:14pt; color:rgb(23,78,134)">, 2021</span></b></p>
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<span style="color:rgb(23,78,134); font-size:14pt"><b>Room: CBB 108</b></span><br>
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<b><span style="font-size:20.0pt; color:#1F497D"></span></b><b><span style="font-size:20.0pt; color:#1F497D"></span></b><b><span style="font-size:20.0pt; color:#1F497D"><strong></strong>Transform Electronics and Photonics by Novel Epitaxy and Nanofabrication<br>
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<div><b><span style="font-size:18.0pt; color:#1F497D">
</span><span style="font-size:18pt; color:rgb(23,78,134); font-family:"Times New Roman",Times,serif"> Xiuling Li</span><span style="font-size:18pt; color:rgb(23,78,134)"></span></b></div>
<div><span style="font-family:"Times New Roman",Times,serif; font-size:16pt; color:rgb(23,78,134)"> Temple Foundation Endowed Professor
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<div>Department of Electrical and Computer Engineering </div>
<div>Microelectronics Research Center</div>
<div>University of Texas at Austin</div>
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<b><span style="color:rgb(12,100,192)">Abstract</span></b><span style="font-size:11pt; font-family:"Calibri","sans-serif"; color:rgb(12,100,192)">:</span><span style="color:#1F497D"><span style="font-size:12pt; font-family:"Times New Roman",serif; color:rgb(12,100,192)">
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<span style="font-size:12.0pt; font-family:"Times New Roman",serif">My group's general interests are in the area of nanostructured semiconductor materials and devices. We focus on developing innovative structures and device concepts through bottom-up epitaxial
growth and top-down fabrication approaches to bring lasting impact to the field of electronics, photonics, and quantum technologies; and potentially medicine. In this talk, I will present two of the nanofabrication platforms we innovated recently and aim to
address some of the pressing issues in nanofabrication and applications:<span style="">
</span>(1) an unorthodox anisotropic etching method, metal-assisted chemical etching (MacEtch), that enables site-controlled semiconductor nanostructure top-down fabrication with unprecedentedly high aspect ratio and materials and structure versatility;<sup>1-3</sup>
and (2) a 3D self-rolled-up membrane (S-RuM) nanotechnology platform for extreme miniaturization of passive electronic components, including inductors, transformers, and filters, for radio frequency integrated circuits (RFICs) and power electronics.<sup>4,5</sup>
I will also present, if time allows, several examples of heterogeneous epitaxy including selective-area and van der Waals epitaxy. </span></p>
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<span style="font-size:6.0pt; font-family:"Times New Roman",serif"> </span></p>
<ol style="margin-bottom:0in">
<li><span style="font-size:10.0pt; font-family:"Times New Roman",serif">"Metal-assisted chemical etching in HF/H2O2 produces porous silicon", X. Li and P.W. Bohn, Appl. Phys. Lett.77, 2572 (2000). </span></li><li><span style="font-size:10.0pt; font-family:"Times New Roman",serif">“High Aspect Ratio â-Ga<sub>2</sub>O<sub>3</sub> Fin Arrays with Low Interface Charge Density by Inverse Metal-Assisted Chemical Etching," ACS Nano, 13, 8, 8784-8792 (2019). </span></li><li><span style="font-size:10.0pt; font-family:"Times New Roman",serif">“Homoepitaxial GaN micropillar array by plasma-free photo-enhanced metal-assisted chemical etching,” J. Vacuu. Sci. Tech. A 39, 053212 (2021). </span></li><li><span style="font-size:10.0pt; font-family:"Times New Roman",serif">"Three-dimensional radio frequency transformers based on a self-rolled-up membrane platform," Nature Electron. 1, 305-313 (2018). </span></li><li><span style="font-size:10.0pt; font-family:"Times New Roman",serif">“Monolithic mTesla Level Magnetic Induction by Self-Rolled-up Membrane Technology," Sci. Adv. 6, eaay4508 (2020). </span></li></ol>
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</span></span><b><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif">Short Bio</span></b><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif">:</span><span lang="EN-SG" style="font-size:12.0pt; font-family:"Times New Roman",serif"></span><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif">
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font-family:"Times New Roman",Times,serif"><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"></span></span><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"></span></span><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"></span></span><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"></span></span><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"></span></span><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"></span></span><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif"></span></span><span style="color:rgb(12,100,192); font-family:"Times New Roman",Times,serif">
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<span style="font-size:12.0pt; font-family:"Times New Roman",serif">Xiuling Li received her B.S. degree form Peking University and Ph.D. degree from the University of California at Los Angeles. Following post-doctoral positions at California Institute of Technology
and University of Illinois, as well as industry experience at II-VI, Inc. (formerly EpiWorks, Inc.), she joined the faculty of the University of Illinois, Urbana-Champaign (UIUC) in 2007 and then relocated to University of Texas (UT) at Austin in Aug. of 2021.
She held the Donald Biggar Willett Professorship in Engineering in the Department of Electrical and Computer Engineering (ECE) and the interim director of the Nick Holonyak Jr. Micro and Nanotechnology Laboratory at UIUC. She is now the Temple Foundation Endowed
Professor in ECE at UT. She has published >160 journal papers and holds >20+ patents, delivered > 120 invited lectures worldwide. Her research has been honored with the NSF CAREER award, DARPA Young Faculty Award, and ONR Young Investigator Award. She is a
Fellow of the IEEE, the American Physics Society (APS), the Optical Society (OSA), and the National Academy of Inventors (NAI). She currently serves as a Deputy Editor of Applied Physics Letters.<span style="">
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<span style="color:rgb(23,78,134); font-size:11pt; font-family:"Times New Roman",Times,serif">Please contact Dr. Cunjiang Yu (cyu6@central.uh.edu) or Dr.
</span><span style="color:rgb(23,78,134); font-size:11pt; font-family:"Times New Roman",Times,serif"></span><span style="color:rgb(23,78,134); font-size:11pt; font-family:"Times New Roman",Times,serif"><span style="font-size:11.0pt; color:#1F4E79"><a href="mailto:yyao4@uh.edu" target="_blank" rel="noopener noreferrer"><span></span></a></span>Jiming
Bao (jbao@uh.edu) if you want to meet with the speaker.</span></div>
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