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<p class="MsoNormal" align="center" style="text-align:center">Weijie Wang’s M.S.
Defense Announcement<o:p></o:p></p>
<p class="MsoNormal" align="center" style="text-align:center"><b><i>X-Ray
Techniques for GaN Characterization</i></b><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" align="center" style="text-align:center">Date: 06/22/2015 (Mon)<o:p></o:p></p>
<p class="MsoNormal" align="center" style="text-align:center">Time: 10:30 am ~ 12:30 pm<o:p></o:p></p>
<p class="MsoNormal" align="center" style="text-align:center">Location: Mechanical Engineering Department small
conference room (ENG 1, #208)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" align="center" style="text-align:center">Committee Chair: Dr
Jae-Hyun Ryou<o:p></o:p></p>
<p class="MsoNormal" align="center" style="text-align:center">Committee members: Dr
Li Sun and Dr Jiming Bao<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" align="center" style="text-align:center;line-height:150%;
mso-pagination:widow-orphan"><span style="font-size:16.0pt;line-height:150%">Abstract<o:p></o:p></span></p>
<p class="MsoNormal" align="left" style="text-align:left;text-indent:24.0pt;
mso-char-indent-count:2.0;line-height:150%;mso-pagination:widow-orphan"><span style="font-size:12.0pt;line-height:150%;mso-fareast-font-family:sans-serif;
background:white;mso-bidi-font-weight:bold">Gallium nitride (<a href="https://en.wikipedia.org/wiki/Gallium" title="Gallium"><span style="color:windowtext;text-decoration:none;text-underline:none">Ga</span></a><a href="https://en.wikipedia.org/wiki/Nitrogen" title="Nitrogen"><span style="color:windowtext;text-decoration:none;text-underline:none">N</span></a>)
is a binary <a href="https://en.wikipedia.org/wiki/Boron_group" title="Boron group"><span style="color:windowtext;text-decoration:none;
text-underline:none">III</span></a>/<a href="https://en.wikipedia.org/wiki/Nitrogen_group" title="Nitrogen group"><span style="color:windowtext;text-decoration:none;text-underline:none">V</span></a> <a href="https://en.wikipedia.org/wiki/Direct_bandgap" title="Direct bandgap"><span style="color:windowtext;text-decoration:none;text-underline:none">direct
bandgap</span></a> <a href="https://en.wikipedia.org/wiki/Semiconductor" title="Semiconductor"><span style="color:windowtext;text-decoration:none;
text-underline:none">semiconductor</span></a></span><span style="font-size:
12.0pt;line-height:150%;background:white;mso-bidi-font-weight:bold">. I</span><span style="font-size:12.0pt;line-height:150%">n recent years, due to unique
characteristics like wide bandgap, large breakdown field strength, superior
carrier saturation velocity, high heat capacity, and thermal conductivity, GaN
is widely applied in light emitting diodes, optoelectronics, high-power and
high frequency electronic devices. <o:p></o:p></span></p>
<p class="MsoNormal" align="left" style="text-align:left;text-indent:24.0pt;
mso-char-indent-count:2.0;line-height:150%;mso-pagination:widow-orphan"><span style="font-size:12.0pt;line-height:150%">However, a large difference in the
coefficient of thermal expansion and lattice constant between GaN epitaxial
layer and the substrate exists. These thermal mismatch and lattice mismatch
lead to strain and the generation of defects in the GaN, affecting the
performance of the devices.<o:p></o:p></span></p>
<p class="MsoNormal" align="left" style="text-align:left;text-indent:24.0pt;
mso-char-indent-count:2.0;line-height:150%;mso-pagination:widow-orphan"><span style="font-size:12.0pt;line-height:150%;color:#231F20">In this dissertation, t</span><span style="font-size:12.0pt;line-height:150%">echniques of X-ray diffraction are
applied for characterization: reciprocal space mapping is applied to analyze
strain and relaxation in epitaxial layers;<span style="color:#231F20"> high-resolution
rocking curves are applied for dislocation density calculation; and X-ray
reflectivity is applied to characterize the thickness and roughness.</span><o:p></o:p></span></p>
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